MicroSense, LLC

Company information:

MicroSense capacitive sensors provide high resolution and fast response for non-contact position and displacement measurement. Previously known as ADE Technologies, and originally founded as a part of ADE Corporation, MicroSense has supplied high resolution capacitive sensors since 1967. Continual technological innovation has been the key to success for MicroSense. The MicroSense technical staff has unparalleled experience in precision sensing, and holds numerous patents on key technology related to capacitive sensors. An extensive global distributor network provides sales and service of MicroSense capacitive sensors.

High Resolution Capacitive Sensors for Position and Displacement Measurement

Capacitive sensors from MicroSense are designed to measure conductive targets. They are used to make very precise, high bandwidth measurements of precision products such as hard disk drive motors, air bearing spindles, precision X-Y stages, solar wafers, automotive parts and machine tools. MicroSense's capacitance gauges provide the highest resolution in the industry, less than 0.05 nanometers, with virtually unlimited service life. Leading equipment manufacturers around the world use MicroSense capacitive sensors in wafer inspection and lithography systems, autofocus mechanisms, nanopositioning stages, metrology tools and other precision manufacturing equipment.

A Wide Range of Capacitive Sensors are Offered by MicroSense

MicroSense offers the widest range of non-contact capacitive position sensors in the industry, in order to meet exact application requirements. Sensor performance is optimized for high stability and linearity, or, highest resolution and measurement bandwidth.

All MicroSense® position sensors feature:

• Completely non-contact capacitive position measurement - the most accurate electrical sensing technology available
• Detection of any conductive, grounded target – surface finish or material have no effect on accuracy
• Optimized for short measurement ranges –10 micrometers up to 4 millimeters, depending upon sensor size
• High accuracy, fast response – up to 100 kHz measurement bandwidth